安全检测:瑞星:安全 诺顿:安全 卡巴:安全
ABSTRACT
Diamond-like carbon (DLC) films have been widely applied to various areas for
their great character. By using Ion Beam Deposition (IBD) and filtered cathodic
vacuum arc (FCVA) techniques, we deposited two kinds of DLC films. Raman
spectroscopy, atomic force microscopy (AFM) and Nano-indenter were used to
characterize the structural feature. Pin-on-disc experiments were conducted on
DLC-coated Si substrates under different sliding speeds, loads, pin materials as well as
lubricant conditions with UMT micro tribo-tester. Then optical microscope, White
light interferometer and scanning electron microscope(SEM) were used to observe and
analysis the worn surface of both the balls and DLC films.
The results indicate that DLC films deposited by FCVA technique can achieve
higher fraction of sp3 bond and therefore higher hardness, which contributes its better
stability and wear resistance when tribological experiments were conducted. When
other conditions are the same, different sliding speed slightly influence the friction
coefficient; higher loading level decreases the friction coefficient; the friction
coefficient tends smaller when the pin material changes from GCr15 steel to Si3N4;
glycerol got better lubricant capacity than water.
Unbroken transfer layer had been observed to prove its existence on the contact
surface. EDS analyses showed the transformation and accumulation of carbon on pin
balls. Meaningful work had been done to help explain the graphitization mechanism of
DLC films.
Keywords:DLC films; tribiology behaviors; graphitization; transfer layer
目录
中文摘要 . I
ABSTRACT .... III
第 1 章 引 言 ..1
1.1 研究背景 .1
1.2 类金刚石 (DLC)膜的制备 ......3
1.2.1 物理气相沉积 [5] ......3
1.2.2 化学气相沉积 [5] ......5
1.2.3 液相沉积法 ...5
1.3 各种条件对 DLC 薄膜摩擦学行为的影响 .6
1.3.1 气源成分 .......6
1.3.2 环境 ....7
1.3.3 摩擦偶件、载荷及速度 ....7
1.4 薄膜的摩擦学机理 ......7
1.4.1 化学吸附钝化悬浮键理论 .8
1.4.2 转移膜理论 ...8
1.4.3 滑行界面的石墨化理论 ....8
1.4.4 氢诱导表面氢键假设模型 .9
第 2 章 实验设备与方法 ...10
2.1 DLC 膜的制备设备 .....10
2.1.1 离子束沉积 (IBD)系统 .....10
2.1.2 FAD MEVVA 复合镀膜系统 ......10
2.2 DLC 膜的表面形貌表征 .......11
2.2.1 光学显微镜表征 ...11
2.2.2 白光干涉仪表征 ...11
2.2.3 AFM 表征 ....11
2.2.4 扫描电镜 (SEM)表征 .......12
2.3 DLC 膜的组成与结构分析 ...12
2.4 DLC 膜的力学性能分析 .......15
2.5 DLC 薄膜的摩擦学性能分析 16
第 3 章 实验结果 ....17
3.1 DLC 膜的制备 ..17
3.1.1 离子束沉积 (IBD)系统 .....17
3.1.2 FAD MEVVA 复合镀膜机系统 ..17
3.2 薄膜厚度测量 ..18
3.3 薄膜的拉曼光谱分析 .18
3.4 薄膜表面形貌观察 ....21
3.4.1 白光干涉仪形貌观察 ......21
3.4.2 AFM 原子力显微镜形貌观察 ....23
3.5 薄膜的硬度与弹性模量测量 .........24
3.6 薄膜摩擦学行为探究和实验方案设计 ....25
第 4 章 FCVA(2#)薄膜的摩擦学特性 26
4.1 各种条件对摩擦系数的影响 .........26
4.1.1 运动频率对摩擦系数的影响 .....26
4.1.2 载荷对摩擦系数的影响 ..28
4.1.3 对偶材料对摩擦系数的影响 .....29
4.1.4 润滑剂对摩擦系数的影响 .........30
4.2 磨斑和磨痕的表面形貌表征 .........32
4.2.1 光学显微镜表征 ...32
4.2.2 白光干涉仪表征 ...35
4.2.3 AFM 原子力显微镜表征 ..36
第 5 章 IBD(1#)DLC 薄膜的摩擦学特性 .....38
5.1 载荷对摩擦系数的影响 .......38
5.2 磨斑磨痕的表面形貌表征 ...39
5.2.1 光学显微镜表征 ...39
5.2.2 扫描电镜 SEM 表征 ........40
5.2.3 能谱分析 (EDS) .....41
5.2.4 拉曼光谱分析表征 43
第 6 章 总结 ..46
6.1 本论文工作 ......46
6.2 未来工作展望 ..47
插图索引 .........48
表格索引 .........51
参考文献 .........52
致 谢 .....55
声 明 .....57
附录 A 书面翻译 ........1